重庆科技学院机构知识库

科研产出

Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering ( EI收录 SCI收录)

1

《Transactions of Nonferrous Metals Society of China》重庆大学材料科学与工程学院;重庆科技学院冶金与材料学院;宁波工程学院材料工程研究所 石永敬 潘复生 鲍明东 潘虎成 Muhammad RASHAD  出版年：2014

Project(50725413)supported by the National Natural Science Foundation of China;Project(2010BB4290)supported by Natural Science Foundation Project of CQ CSTC,China

Nano-scaled ZrNbAlN films with different negative bias voltages（Vb） were deposited on bronze substrate and Si（...

关键词：ZrNbAlN multilayer film  magnetron sputtering  COMPOSITION CORROSION