文献类型：期刊文章

作　　者：石永敬[1,2] 潘复生[1] 鲍明东[3] 潘虎成[1] Muhammad RASHAD[1]

机构地区：[1]重庆大学材料科学与工程学院,重庆400044 [2]重庆科技学院冶金与材料学院,重庆401331 [3]宁波工程学院材料工程研究所,宁波315016

出　　处：《Transactions of Nonferrous Metals Society of China》

基　　金：Project(50725413)supported by the National Natural Science Foundation of China;Project(2010BB4290)supported by Natural Science Foundation Project of CQ CSTC,China

年　　份：2014

卷　　号：24

期　　号：9

起止页码：2856-2863

语　　种：中文

收录情况：AJ、CAS、CSA、CSA-PROQEUST、CSCD、CSCD2013_2014、EBSCO、EI、IC、INSPEC、JST、SCI(收录号：WOS:000344001700015)、SCI-EXPANDED(收录号：WOS:000344001700015)、SCIE、SCOPUS、WOS、ZGKJHX、普通刊

摘　　要：Nano-scaled ZrNbAlN films with different negative bias voltages（Vb） were deposited on bronze substrate and Si（100） wafers by a reactive unbalanced magnetron sputtering technique. Composition and structure properties were characterized by X-ray photoelectron spectroscopy and X-ray diffraction. It is found that mole concentrations of Zr and Nb are affected by Vb, which leads to the increase of binding energy of N 1s and Al 2p and decrease of binding energy of Zr 3d5/2 and Nb 3d5/2. Surface morphologies evolution controlled by Vb could be observed. Furthermore, X-ray diffraction patterns reveal that these films show a（111） preferred orientation. Moreover, mechanical property and corrosion behavior of ZrNbAlN films were characterized by nanoindentation test and corrosion test, respectively. A maximum value of 21.85 GPa at-70 V occurs in the ZrNbAlN- bronze system, which outperforms uncoated bronze. Corrosion experiments in 0.5 mol/L NaCl and 0.5 mol/L HCl solution show that corrosion potential and corrosion current are dependent on Vb, and better anti-corrosion property could be obtained at-90 V.

关 键 词：ZrNbAlN multilayer film  magnetron sputtering  COMPOSITION CORROSION

分 类 号：TB383.2[材料类]