文献类型：会议

作　　者：李山东 袁钻如 杜正恭

作者单位：福建师范大学物理系,福州市350007,中国 台湾清华大学材料科学与工程系,新竹30013,台湾 南京大学材料分析中心,南京210093,中国 台湾清华大学材料科学与工程系,新竹30013,台湾

会议文献：第六届中国国际纳米科技研讨会论文集

会议名称：第六届中国国际纳米科技研讨会

会议日期：20071119

会议地点：成都

主办单位：中国微米纳米技术学会

出版日期：20071119

语　　种：中文

摘　　要：Nanocrystalline FeCoZr films with Zr composition gradient were prepared by gradient sputtering (GS) method at room temperature. A uniaxial magnetic anisotropy (UMA) with high Hk up to 305 Oe was achieved by controlling the composition gradient of doping element Zr. The origin of UMA can be attributed to the uniaxial stress gradient, which is resulted from the composition gradient. It is interesting to note that as-deposited GS films without magnetic annealing exhibited promising high-frequency ferromagnetic properties with resonance frequency over 3 GHz. This room-temperature fabrication process resolves a critical issue, I.e. To obtain a high resonance ferromagnetic film material under a compatible technology between ferromagnetic film preparation and monolithic integrated circuits (MICs) techniques.

关 键 词：Gradient sputtering  High-frequency ferromagnetic films  uniaxial anisotropy  composition gradient  

分 类 号：ZZ]