专利详细信息

一种复合波片相位延迟器优化设计方法

文献类型：专利

专利类型：发明专利

是否失效：否

是否授权：否

申请号：CN201510359576.1

申请日：20150625

发明人：江浩刘世元谷洪刚张传维

申请人：武汉颐光科技有限公司

申请人地址：430074 湖北省武汉市武汉高新大道999号未来科技城C2座2楼

公开日：20150916

公开号：CN104914497A

代理人：李佑宏

代理机构：42224 武汉东喻专利代理事务所(普通合伙)

语　　种：中文

摘　　要：本发明公开了一种复合波片相位延迟器优化设计方法，包括以下步骤：1)由n个四分之一零级波片共同构成复合波片相位延迟器；2)确定每个四分之一零级波片的中心波长及光轴方位角的变动范围；3)获得第k个四分之一零级波片的传输琼斯矩阵；4)获得复合波片相位延迟器的等效传输琼斯矩阵；5)获取复合波片的等效特征参数；6)获得椭偏仪测量系统的系统矩阵；7)获得椭偏仪测量系统的系统矩阵条件数；8)获得椭偏仪测量系统矩阵条件数在波段范围Γ内的最大值；9)调整每个四分之一零级波片的中心波长和光轴方位角，获得每次调整的最大值，然后得到所有最大值中的最小值。本发明能很好地适应椭偏仪测量系统使用需求。

主权项：1.一种复合波片相位延迟器优化设计方法，其特征在于：包括以下步骤：1)由n个四分之一零级波片共同构成复合波片相位延迟器，确定每个四分之一零级波片的材料及其相应的光学特性，并选择复合波片相位延迟器的适用波段范围Γ，其中n>1；2)确定每个四分之一零级波片的中心波长及光轴方位角的变动范围：每个四分之一零级波片的中心波长的变动范围均为[A,B]，光轴方位角的变动范围均为[C,D]，其中A<B,C<D，A、B、C和D均为设定的常数；3)设定第k个四分之一零级波片的中心波长λ_k和光轴方位角θ_k，并且λ_k∈[A,B]，θ_k∈[C,D]，其中k＝1,2,…,n；然后获得第k个四分之一零级波片的传输琼斯矩阵 $<math> <mrow> <mi>M</mi> <mrow> <mo>(</mo> <mrow> <msub> <mi>δ</mi> <mi>k</mi> </msub> <mo>,</mo> <msub> <mi>θ</mi> <mi>k</mi> </msub> </mrow> <mo>)</mo> </mrow> <mo>=</mo> <mfenced open = '[' close = ']'> <mtable> <mtr> <mtd> <mrow> <msub> <mi>cosθ</mi> <mi>k</mi> </msub> </mrow> </mtd> <mtd> <mrow> <mo>-</mo> <msub> <mi>sinθ</mi> <mi>k</mi> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>sinθ</mi> <mi>k</mi> </msub> </mrow> </mtd> <mtd> <mrow> <msub> <mi>cosθ</mi> <mi>k</mi> </msub> </mrow> </mtd> </mtr> </mtable> </mfenced> <mfenced open = '[' close = ']'> </p><p class='subject'><strong>关键词：</strong>测量系统 <b class='type_ico_id'></b>复合波片 <b class='type_ico_id'></b>波片椭偏相位延迟器 <b class='type_ico_id'></b>矩阵 <b class='type_ico_id'></b>系统矩阵 <b class='type_ico_id'></b>中心波长方位角光轴优化设计方法波段范围矩阵条件特征参数 <b class='type_ico_id'></b>条件数 </p><p class='class'><strong>IPC专利分类号：</strong>G02B5/30(20060101)</p>
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